MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

主题词：Advanced MEMS and NEMS Technologies; Mechanical and Optical Resonators; Acoustic Wave Resonator Technologies; Microfluidic and Capillary Electrophoresis Applications; Adhesion, Friction, and Surface Interactions; Advanced Surface Polishing Techniques; Nanofabrication and Lithography Techniques; Advanced Sensor and Energy Harvesting Materials; Force Microscopy Techniques and Applications; Microfluidic and Bio-sensing Technologies; 3D IC and TSV technologies; Photonic and Optical Devices; Tribology and Lubrication Engineering; Additive Manufacturing and 3D Printing Technologies; Innovative Energy Harvesting Technologies; Electrowetting and Microfluidic Technologies; Electronic Packaging and Soldering Technologies; Iterative Learning Control Systems; Advancements in Photolithography Techniques; Innovative Microfluidic and Catalytic Techniques Innovation; Injection Molding Process and Properties; Nonlocal and gradient elasticity in micro/nano structures; Advanced machining processes and optimization; Metal and Thin Film Mechanics; Piezoelectric Actuators and Control