IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING

主题词：Industrial Vision Systems and Defect Detection; Integrated Circuits and Semiconductor Failure Analysis; Semiconductor materials and devices; Manufacturing Process and Optimization; Advancements in Photolithography Techniques; Advancements in Semiconductor Devices and Circuit Design; Scheduling and Optimization Algorithms; Silicon and Solar Cell Technologies; Advanced Surface Polishing Techniques; VLSI and Analog Circuit Testing; Advanced Statistical Process Monitoring; Fault Detection and Control Systems; 3D IC and TSV technologies; Advanced Manufacturing and Logistics Optimization; Ferroelectric and Negative Capacitance Devices; Copper Interconnects and Reliability; Thin-Film Transistor Technologies; Semiconductor materials and interfaces; Electronic Packaging and Soldering Technologies; VLSI and FPGA Design Techniques; Image Processing Techniques and Applications; Surface Roughness and Optical Measurements; Advanced machining processes and optimization; Wireless Body Area Networks; Bluetooth and Wireless Communication Technologies